Question:If a multilevel metallization process consists of 10 layers,
how many oxide plasma etchers are needed...
Question
If a multilevel metallization process consists of 10 layers,
how many oxide plasma etchers are needed...
If a multilevel metallization process consists of 10 layers,
how many oxide plasma etchers are needed to etch contact holes if
the oxide etch rate is 1 μm/min, in a 100 000 WPM fab?