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A process is run in a standard horizontal LPCVD tube, where the wafers are loaded on...

A process is run in a standard horizontal LPCVD tube, where the wafers are loaded on edge in a standard slotted boat. What factors might explain a reduction in the deposition rate from the front of the tube to the back? from the edge of each wafer to the centre ? what would you do to try to improve the uniformity in each case?

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