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What are the most critical steps during photolithography? Why?

What are the most critical steps during photolithography? Why?

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Answer #1

Photolithography is the process of transferring geometric shapes on a mask to the surface of a silicon wafer.

The steps involved in the photolithographic process are

a. wafer cleaning

b. barrier layer formation

c. photoresist application

d. soft baking

e. mask alignment

f. exposure and development

g. hard-baking

Out of above Most importanat step is mask alignment,Once the mask has been accurately aligned with the pattern on the wafer's surface, the photoresist is exposed through the pattern on the mask with a high intensity ultraviolet light

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